| 摘要 |
PROBLEM TO BE SOLVED: To provide a high purity hydrogen peroxide solution by simply and efficiently removing dissociating impurities and non-dissociating impurities, which are poor in removing efficiency in a simple combination of an ion exchange resin and an adsorbent and are present in a raw material hydrogen peroxide solution, with an adequate combination and operation of the ion exchange resin and the adsorbent. SOLUTION: In this method, a high purity hydrogen peroxide solution having <=0.1ppb metal concentration and <=10ppm concentration of total organic carbon is obtained by using an ion exchange resin and an adsorbent. The solution feeding and purifying processes are composed of in this order: (A) a removing process for dissociating impurities by a mixed bed type ion exchange resin device, successively (B) a removing process of the non-dissociating impurities by an adsorbent device and further (C) a removing process of dissociating impurities by a mixed bed type ion exchange resin device. |
