VAPOR DEPOSITION POLYMERIZATION PROCESS,申请号JP19960115743-传众专利搜索

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发明名称	VAPOR DEPOSITION POLYMERIZATION PROCESS
摘要
申请公布号	JPH09278805(A)	申请公布日期	1997.10.28
申请号	JP19960115743	申请日期	1996.04.12
申请人	ULVAC JAPAN LTD	发明人	IIJIMA MASAYUKI
分类号	C08F2/00;C23C14/12;C23C14/24;(IPC1-7):C08F2/00	主分类号	C08F2/00
代理机构		代理人
主权项
地址

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