发明名称 SEMICONDUCTOR BODY WITH A SUBSTRATE GLUED TO A SUPPORT BODY
摘要 A semiconductor device comprises a substrate (1) with a plane surface (4) on which a layer structure (2) is formed in a number of layers (5, 7, 9, 13, 15, 17). The side of the substrate on which the layer structure was formed is fastened to a plane support body (18) by means of a glue layer (19) which encompasses spacer elements (20). These spacer elements are fastened to the surface of the substrate and all have the same height measured from the surface (4). In fastening the substrate to the support body, glue is provided and the substrate is pressed onto the support body so that the pressure is evenly distributed over the spacer elements.
申请公布号 WO9734321(A3) 申请公布日期 1997.10.23
申请号 WO1997IB00157 申请日期 1997.02.25
申请人 PHILIPS ELECTRONICS N.V.;PHILIPS NORDEN AB 发明人 MAAS, HENRICUS, GODEFRIDUS, RAFAEL;DEKKER, RONALD;MICHIELSEN, THEODORUS, MARTINUS;VAN DEN EINDEN, WILHELMUS, THEODORUS, ANTONIUS, JO
分类号 H01L27/12;H01L21/02;H01L21/58;H01L23/04;H01L23/10;H01L23/16;H01L23/64 主分类号 H01L27/12
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