| 摘要 |
<p>PROBLEM TO BE SOLVED: To downsize a piezoelectric element for cancelling displacement of a positioning stage due to disturbance. SOLUTION: A ring-like piezoelectric element 3 is arranged between a bearing base 1 fixed to a base board F such as a positioning stage and a bearing housing 2 integrated with a porous body 4. When the positioning stage is displaced due to disturbance or the like, the piezoelectric element 3 is driven, the porous body 4 is moved for cancelling the disturbance. The larger the bearing rigidity of the porous body 4 is, the smaller the driving stroke of the piezoelectric element 3 is. The piezoelectric element 3 can be downsized. The bearing rigidity of the porous body 4a is improved by filling pores on a surface 4a of the body 4, and fluctuation of the bearing rigidity due to frequency of the disturbance is prevented.</p> |
