| 摘要 |
PROBLEM TO BE SOLVED: To execute piercing of prescribed diameter holes in high speed and precision by arranging a mask having many kinds of holes to specify a diameter of the holes to be arranged to a work in the light guide of laser beam. SOLUTION: A switching mechanism 13 of via hole diameter is arranged in a light guide of laser beam. This switching mechanism 13 includes a mask 13-1 having different diameter holes (e.g. 16 holes) H1-H16 at equal angle interval in the circumference, a mask holder 13-2 having windows W1-W16 in the region corresponding to the holes H1-H16 and holding the mask 13-1 and a drive part 13-3 which rotates the integrated body of mask 13-1 and mask holder 13-2. The switching mechanism 13 is arranged so that when the mask 13-1 rotates the holes H1-H16 pass the optical path of laser beam, that is, the switching mechanism 13 is arranged so that the rotating axis of mask 13-1 is parallel with the optical path, further, the virtual circle connecting the centers of holes H1-H16 is positioned in the optical path. |
