ROBINET D'EVACUATION, PROCEDE DE RECHAUFFEMENT DE CE ROBINET, ET POMPE CRYOGENIQUE LE COMPORTANT

摘要

A cryopump having a cryopump chamber (12) includes a purge gas valve (38) coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A roughing valve (26) couples the cryopump chamber to a roughing pump (22) enabling the cryopump chamber to be roughed. An exhaust valve (48) is coupled to the cryopump chamber for exhausting gases from the cryopump chamber during purge. A delivery valve (44) is coupled to the exhaust valve for delivering a second quantity of warm gas directly onto surfaces of the exhaust valve for warming the surfaces of the exhaust valve.