摘要 |
The resonator (1) has a silicon layer (2) on a silica insulator (4) forming a waveguide with four mirrors (5), etched onto the layer. The lateral confinement is achieved by an N+ doping (2c) and a P+ doping (2b) of the layer while the resonator is commanded by the bias of the P+NN+ junction thus defined or by optical means. A metal reflector is placed straight after the coupling grating on a silica pacifying layer to increase the coupling efficiency. The confinement gives a quasi-monomode waveguide using notably phosphorus and boron dopants. |