发明名称 Infra-red spatial light modulator using ring resonator
摘要 The resonator (1) has a silicon layer (2) on a silica insulator (4) forming a waveguide with four mirrors (5), etched onto the layer. The lateral confinement is achieved by an N+ doping (2c) and a P+ doping (2b) of the layer while the resonator is commanded by the bias of the P+NN+ junction thus defined or by optical means. A metal reflector is placed straight after the coupling grating on a silica pacifying layer to increase the coupling efficiency. The confinement gives a quasi-monomode waveguide using notably phosphorus and boron dopants.
申请公布号 FR2747484(A1) 申请公布日期 1997.10.17
申请号 FR19960004589 申请日期 1996.04.12
申请人 FRANCE TELECOM 发明人 KOSTER ALAIN;PASCAL DANIEL
分类号 G02F1/225 主分类号 G02F1/225
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