| 摘要 |
<p>A cathodic arc cathode is provided with an insulating ring (102) in close proximity to the underside of the cantilevered edge of the target (101), and with no other conducting surface exposed in the coating system. An electrical connection (107) is provided to opposite ends of the cathode through two or more low resistance resistors (106) with high temperature coefficients of resistance. For all cases of cathodic arc deposition, the system causes the arc to reliably remain on the cathode surface and move randomly, thereby assuring uniform cathode erosion on large or small planar or cylindrical cathodes, which can be produced at low cost.</p> |
