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发明名称
DENRYUCHIHYOJITSUKIIC
摘要
申请公布号
JP2663850(B2)
申请公布日期
1997.10.15
申请号
JP19930290244
申请日期
1993.11.19
申请人
NIPPON DENKI KK
发明人
MORISATO TETSUMASA
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
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地址
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