| 摘要 |
<p>PURPOSE:To obtain a system for accurately simulating the fabrication conditions with no individual difference. CONSTITUTION:Upon request from a simulator 110, a host computor 105 transfers past data stored at each section 106-109 to a memory medium 111. Based on the past data thus transferred, the simulator 110 prepares a simulation model and the simulation results for the simulation model are compared with actual results, i.e., the totalized results of past data, thus checking any significant difference therebetween. If significant difference is present, parameters in the simulation model are regulated and the simulation is conducted again. The regulation is repeated until any significant difference is eliminated between the actual past results and the simulation results. Subsequently, the future is predicted using the final simulation model and the simulation results are fed back to a semiconductor device machining line 101.</p> |
