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发明名称
EKISOEPITAKISHARUSOCHONOSAGYOBOTSUKUSU
摘要
申请公布号
JP2662615(B2)
申请公布日期
1997.10.15
申请号
JP19880066845
申请日期
1988.03.18
申请人
TOKYO EREKUTORON KK
发明人
TOKI MICHIO
分类号
H01L21/208;C30B19/00;C30B19/06;(IPC1-7):C30B19/06
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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