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发明名称
SHUSEKIKAIRONOBAIASUKYOKYUKAIRO
摘要
申请公布号
JP2660027(B2)
申请公布日期
1997.10.08
申请号
JP19880291654
申请日期
1988.11.17
申请人
TOSHIBA KK
发明人
KAMOSHITA IWAO;YAMAMOTO TAKESHI
分类号
H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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