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经营范围
发明名称
SICNOETSUCHINGUHOHO
摘要
申请公布号
JP2661390(B2)
申请公布日期
1997.10.08
申请号
JP19910057524
申请日期
1991.03.22
申请人
SHIMAZU SEISAKUSHO KK
发明人
KOEDA MASARU;NAGANO TETSUYA
分类号
G02B5/18;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
G02B5/18
代理机构
代理人
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