| 摘要 |
PROBLEM TO BE SOLVED: To simplify a structure and to observe a sample surface and a cantilever at the same time by using an objective lens of high magnification, in regard to detecting equipment of displacement of a scanning force microscope of an optical lever type. SOLUTION: A cantilever 12 equipped with a probe 18, a holding part 11 holding the cantilever, a laser light source 13 for casting laser light on the cantilever, a photodetector 14 receiving the laser light reflected and an optical microscope enabling observation of a sample surface and the back of the cantilever from above, are provided. The probe faces the surface to be measured. In this construction, a specular surface is formed in a face 11a of the holding part which is positioned on the cantilever side. The laser light from the laser light source is reflected first on the specular surface of the holding part, cast thereafter on a reflecting surface formed at the back of the cantilever and reflected again on this surface and enters the photodetector.
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