| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer boat which does not cause a deflection by easily reforming the flexion of a supporting rod by heating. SOLUTION: This wafer boat is composed of a two or more supporting rods 2 and 3, which support a wafer, and a retaining member 1 which retains both ends of these supporting rods 2 and 3. In this case, one or all supporting rods 3 are made in columnar form, and a plurality of supporting grooves for supporting the wafer are cut around it. This wafer boat is kit type. This is arranged so that a deflection may not occur by rotating the columnar supporting rod 3 periodically.</p> |
