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发明名称
PATTERN FORMING METHOD OF THIN FILM
摘要
申请公布号
JPH09263943(A)
申请公布日期
1997.10.07
申请号
JP19960070179
申请日期
1996.03.26
申请人
CITIZEN WATCH CO LTD
发明人
NAGASAWA TAKESHI
分类号
C23C16/02;C23C16/04;C23C16/27;H01L21/203;H01L21/205;H01L21/28;H01L21/3205;(IPC1-7):C23C16/04;H01L21/320
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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