发明名称 |
Method of synthesizing diamond-like carbon thin films |
摘要 |
A method for synthesizing a hard diamond-like thin film on a rotating substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by a factor of 10 or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to a mesh-shaped internal electrode provided in the first vacuum vessel.
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申请公布号 |
US5674573(A) |
申请公布日期 |
1997.10.07 |
申请号 |
US19930174169 |
申请日期 |
1993.12.29 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
MITANI, TSUTOMU;NAKAUE, HIROKAZU;KUROKAWA, HIDEO |
分类号 |
C23C16/26;C23C16/452;C23C16/54;H01J37/32;(IPC1-7):B05D3/06 |
主分类号 |
C23C16/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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