| 摘要 |
A method and apparatus for irradiating a surface of a workpiece utilizing several discrete component beams. The irradiation exposes a photosensitive layer on a surface of a workpiece to be processed. A deflecting device is provided having a plurality of elements assigned to corresponding ones of the component beams. Each component beam is directed individually or in combination with other component beams by the deflecting device. In this way, different points and zones on the surface of the workpiece to be processed can be irradiated simultaneously.
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