Anorganische Filtrationsmembrane mit im wesentlichen sauerstoffreier keramischer Trennschicht

摘要

Inorganic filtration membrane comprising a porous support A in contact with a ceramic separating layer B substantially free from oxygen and made from a combination of at least two elements chosen from silicon, boron, aluminium, titanium, tungsten, phosphorus, zirconium, nitrogen and carbon, and deposited by the vapour-phase chemical deposition (CVD) process or by the plasma-assisted vapour-phase chemical deposition (PECVD) process. The membranes according to the invention can be employed more particularly in microfiltration, ultrafiltration and tangential nanofiltration.