| 摘要 |
<p>An anode (110) and an a cathode (115) in a gas laser (100), such as an excimer laser, are spaced in a first direction. A voltage difference between these members produces an electrical discharge which ionizes gasses (130) in the laser (100) to react chemically and produce coherent radiation. First and second tubes (145) made from a dielectric material are designed in contradiction to conventional designs by utilizing a constant, larger tube diameter with thicker tube walls. These first and second tubes (145) extend through the laser (100) in a second direction transverse (preferably perpendicular) to the first direction. The anode (110), the cathode (115) and the tubes (145) extend through the laser (100) in a direction transverse to the first and second directions. The use of a thicker walled, large tube of constant diameter allows the use of a commercial grade polycrystalline aluminum oxide ceramic, rather than ultra pure ceramics. Bushings (180) having anti-tracking grooves (170) incorporated therein are truly integral with the tube, (145) in that they are directly machined at each end of the tube (145), making the tubes easier and less costly to manufacture. The tube's larger diameter provides a greater surface area for the generation of photons, thereby creating a greater pre-ionizing effect than conventional designs. <IMAGE></p> |
