| 摘要 |
PURPOSE:To improve the strength of the rugged parts of the sensor by forming the root parts of the rugged parts of an insulating substrate to an arc shape with which stress concentration hardly arises. CONSTITUTION:Projecting parts 11 constituting many slender plate shapes are arrayed and provided in two rows on the surface of the insulating substrate 10 formed by coating the surface of a conductive substrate 13 consisting of silicon, etc., of the sensor with an insulating layer 14 consisting of silicon dioxide, etc. A working electrode 20 and a counter electrode 30 are formed on the respective projecting part arrays. A reference electrode 40 is formed to the flat part between the working electrode 20 and the counter electrode 30. The electrodes of the working electrode 20..., etc., are formed of electrode materials, such as platinum and gold. The surface of the insulating substrate 10 is coated with the electrolyte layer 50 consisting of a high- polymer solid electrolyte, etc. and the projecting parts 11 are partly exposed to the upper part of the electrolyte layer 50. The respective electrodes 20... are partly extended to the outside of the electrolyte layer 50 to constitute terminal parts 22, 32, 42 for connection to external circuits. The stress concentration in the root parts of the rugged parts of the insulating substrate 10 is decreased in this way and the strength of the rugged pats is improved. |
