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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2659980(B2)
申请公布日期
1997.09.30
申请号
JP19880015922
申请日期
1988.01.28
申请人
TOSHIBA KK
发明人
KOGA TERUHIDE;YOKOGAWA SHUNJI
分类号
H01L21/302;H01L21/306;H01L21/3065;H01L21/3205;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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