| 摘要 |
PURPOSE:To implement high accuracy in yawing correction, by providing pushing means, which partially impart arbitrary pushing forces, at both side surfaces of a rail arranged on a base, and adjusting the arranging position of the rail. CONSTITUTION:A moving table 2 is attached on a base 1 so that the table can be moved in a specified direction through a pair of linear guides comprising rails 4, bearings 3 and rollers 9. A plurality of pressure adjusting screws 6 and 8 are attached to the blocks 5 and 7 at an arbitrary interval 1 respectively. Pressures are applied to the side surfaces of each rail 4 from the different directions so as to face each other. Thus, the bending of the rail 4 is adjusted and corrected. Therefore, highly accurate yawing correction can be performed. |
