| 摘要 |
PROBLEM TO BE SOLVED: To highly precisely apply an electrode conducting or electrode forming paste on an ink jet head of piezoactuator system. SOLUTION: An X axis stage 63, a Y axis stage 64 and aθaxis stage 65 which are high in resolution and capable of highly precise positioning are arranged in order on a base 61 and a workpiece W is held by theθaxis stage 65. Then a Z axis stage 66 using the stage high in resolution and capable of highly precise positioning is mounted at a supporter 62 to hold a syringe fitting a dispenser needle 69.
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