| 摘要 |
PURPOSE:To obtain a very efficient light-emitting element capable of emitting light only at a resonance wavelength depending on structure of a three- dimensional optical resonator by providing the three-dimensional optical resonator substantially with a periodic structure arranged in parallel to a layer. CONSTITUTION:Reflecting body layers 12, 13 for reflecting light emitted from a light-emitting layer 14 are formed on a substrate 11. The light-emitting layer 14 is then deposited thereon and provided with a two-dimensional periodic structure parallel to the layer 14 by photolithography utilizing dry etching. Further, the periodic structure of the light-emitting layer 14 is covered with a buried layer 15 and, subsequently, another pair of reflecting body layers 12, 13 are provided. The resulting layer-built structure as a whole is a three- dimensional optical confinement semiconductor resonator structure 16. According to such arrangement, any light-emitting energy can be obtained at a resonance wavelength determined by the resonator structure 16 and therefore the light emitting efficiency can be improved. |
