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发明名称
SUHOTSUTOMETSUKIRIIDOFUREEMUNORENZOKUSENJOHOHO
摘要
申请公布号
JP2658071(B2)
申请公布日期
1997.09.30
申请号
JP19870219964
申请日期
1987.09.02
申请人
HITACHI DENSEN KK
发明人
OGINOME NOBORU
分类号
C23G3/00;B08B3/02;H01L23/50;(IPC1-7):C23G3/00
主分类号
C23G3/00
代理机构
代理人
主权项
地址
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