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发明名称
VERFAHREN ZUR ÜBERPRÜFUNG DER BETRIEBSPOSITION DES ROTIERENDEN SYSTEMS EINER VAKUUMPUMPE, VORZUGSWEISE TURBOMOLEKULARPUMPE
摘要
申请公布号
DE59307178(D1)
申请公布日期
1997.09.25
申请号
DE19935007178
申请日期
1993.07.06
申请人
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450 HANAU, DE
发明人
SCHNEIDER, HELMUT, D-5352 ZUELPICH, DE
分类号
F04D19/04;F04D29/64;F16C39/06;(IPC1-7):F04D19/04
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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