摘要 |
In a device for supporting and linearly moving a movable member has a function that a radial displacement of the movable member is compensated in one position, and a radial angle of the movable member is compensated in other position, or a function that the movable member is supported while maintaining a radial angle of the movable member, or a function that the movable member is positioned on the basis of compensating signals removing the external force generated by a rotational actuator.
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