WAFER TESTER,申请号JP19960058730-传众专利搜索

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发明名称	WAFER TESTER
摘要
申请公布号	JPH09252031(A)	申请公布日期	1997.09.22
申请号	JP19960058730	申请日期	1996.03.15
申请人	NEC CORP	发明人	NIKAIDO MASATO;NAKAIZUMI KAZUO;YOSHIMA MASAYUKI
分类号	G01R31/26;G01R1/06;G01R31/28;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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