| 摘要 |
<p>PROBLEM TO BE SOLVED: To make a new element available when an element in use is contaminated by coating the surface of a sensing element with a coat member which can be automatically opened, opening the coat member of a required element and keeping an unused element coated. SOLUTION: Each of a plurality of sensing elements 11 mounted on a semiconductor substrate 10 such as silicon is coated by a coat member 15 which can be automatically opened by an external signal or the like without directly touching it with a hand. The sensing elements 11 during use and after use are brought into contact with fluid by opening the coat member 15, while unused elements 11 are kept from contact with the fluid by coating with the coat member 15, Thus, when a sensor 1 is contaminated, the contaminated element 11 can be replaced with a new element without replacing the sensor 1 itself. In addition, by sequentially using the required element 11 with its coat member 15 automatically removed, the reduction in service life of the sensor 1 due to deposition of oil or dust can be delayed by the number of installed elements 11.</p> |
