| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever chip by which the tip of a probe can be scanned smoothly and surely with reference to a desired measuring place without being affected by the surface shape of a sample. SOLUTION: A cantilever chip 2 is provided with a support part 4 which comprises a support face 4a and a mounting face 4b facing the support face, with a cantilever 6 which is supported by the support face 4a at the support part 4 and with a probe 8 which is installed at the free end of the cantilever 6. At the support part 4, the width size of the support face 4a is reduced more than the width size of the mounting face 4b so that a probe can be scanned to a desired measuring place without being affected by the surface shape of a sample. The width size W1 of the support face 4a is reduced more than the width size W2 of the mounting face 4b by which the cantilever chip is attached to an SPM apparatus. A first slope 10 and a second slope 12 which are formed along the longer axis of the cantilever 6 are exposed between the support face 4a and the mounting face 4b. |
