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发明名称	IONCHUNYUSOCHI
摘要
申请公布号	JP2654769(B2)	申请公布日期	1997.09.17
申请号	JP19960025525	申请日期	1996.02.13
申请人	HITACHI SEISAKUSHO KK	发明人	OONO YASUNORI;KUROSAWA TOMOE;SATO TADASHI;KUROSAWA YUKIO;HAKAMATA YOSHIMI
分类号	H05H1/46;C23C14/48;C23F4/00;G21K5/04;H01J27/18;H01J37/305;H01J37/317;H01L21/265;(IPC1-7):C23C14/48	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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