发明名称 |
Catadioptric reduction projection optical system |
摘要 |
A first partial optical system including a first group of lenses having a positive refractive power, a first concave reflection mirror and a second group of lenses having a positive refractive power, for forming a primary reduced image of an object, a second partial optical system including a second concave reelection mirror and a third group of lenses having a positive refractive power, for further reducing the primary reduced image and refocusing it, and a reflection mirror arranged between the first partial optical system and the second partial optical system, for deflecting a light path are arranged in a sequence as viewed from the object. A good image-forming ability as a projection optical system for fabricating a semiconductor device is attained with a simple construction.
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申请公布号 |
US5668673(A) |
申请公布日期 |
1997.09.16 |
申请号 |
US19950456624 |
申请日期 |
1995.06.01 |
申请人 |
NIKON CORPORATION |
发明人 |
SUENAGA, YUTAKA;ISHIYAMA, TOSHIRO;SHIMIZU, YOSHIYUKI;HAYASHI, KIYOSHI |
分类号 |
G02B17/08;G03F7/20;(IPC1-7):G02B17/00;G02B21/00 |
主分类号 |
G02B17/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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