| 摘要 |
PROBLEM TO BE SOLVED: To prevent as far as possible a warpage of a piezoelectric vibration plate caused by a polarization by a method wherein after a piezoelectric vibration plate is adhered to a supporting plate, a polarization of the piezoelectric vibration plate is provided, thereafter, a tooth-cutting is provided by a predetermined pitch. SOLUTION: The surface of an area 2 which is an inactivity area of a piezoelectric vibration plate 1 is adhered to a supporting plate 4 forming an electrode layer 3 to form a plate vibration unit. The adhesion is provided so that a segment electrode 6 which is one outer electrode of a piezoelectric vibration plate becomes conductive to an electrode layer 3 formed on a supporting plate 4. In this plate vibration unit state, a direct current voltage is applied and a polarization is provided between a common electrode 7 of a piezoelectric material and a segment electrode 6 or between a common electrode and the electrode layer 3 on the supporting plate 4. Thereafter, a piezoelectric vibrator unit is formed by a method wherein the electrode layer 3 on the supporting plate 4 is cut to separate the piezoelectric vibrators 8a, 8b, 8b,... 8b, 8a, and a common electrode plate 9 is adhered. Further, the piezoelectric vibrators 8a, 8a are dummy vibrators. |
