| 摘要 |
PROBLEM TO BE SOLVED: To perform three-dimensional fine working in a short time by using a X-ray device provided with a mechanism outputting ON/OFF signals of the X-ray radiation to a X-ray generating mechanism and displacement driving signals to a driving mechanism, respectively. SOLUTION: In this X-ray three-dimensional working device, since the X-ray is well absorbed into the matter 3 to be worked, when the position condensing the X-ray is made to conforms to the position working a matter 3 to be worked and the matter 3 to be worked is irradiated with the X-ray, working is performed while transpirating and removing a part to be irradiated using a transpiration effect by heat generated at that time. As the X-ray is finely condensable into about ϕ1μm, the three-dimensional fine working is performed at the precision of several μm order when the matter 3 to be worked is irradiated with the X-ray. By this way, the working time is reduced regardless of material of the matter 3 to be worked and a high precision of three-dimensional fine working is performed. |
