发明名称 POLISHING DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent a sun gear and an internal gear from wearing during operation by engaging the sun gear and internal gear with the tooth section of a planet gear so that a rotary member having a tooth section is rotated in the rotary member rotate in the direction causing friction between the rotary member and the tooth section of the planet gear. SOLUTION: When a sun gear 3 is rotated, the engaging force of a pin body 31 is applied to the external gears 70 of a carrier 7 in the direction to rotate the sun gear 3. The force in the opposite direction of the component force of the engaging force which works to a ring body 32 in the tangential direction is absorbed while rotating the ring body 32 of the peripheral section of the pin body 31, causing little friction in the ring body 32. On the other hand, also in the tooth section 40 of an internal gear 4, a ring body 42 turns round a pin body 41 while being engaged with the external teeth 70 of the carrier 7, preventing the sung gear and internal gear from wearing.
申请公布号 JPH09239657(A) 申请公布日期 1997.09.16
申请号 JP19960070907 申请日期 1996.03.04
申请人 SPEEDFAM CO LTD 发明人 TOJO RYOSUKE
分类号 B24B37/27;B24B37/28 主分类号 B24B37/27
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