Verfahren zum gruppenweisen Herstellen von Mikrostrukturen, welche mindestens an einer Seite mit einer Membran verschlossen sind,申请号DE19914114269-传众专利搜索

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发明名称	Verfahren zum gruppenweisen Herstellen von Mikrostrukturen, welche mindestens an einer Seite mit einer Membran verschlossen sind
摘要
申请公布号	DE4114269(C2)	申请公布日期	1997.09.11
申请号	DE19914114269	申请日期	1991.05.02
申请人	FORSCHUNGSZENTRUM KARLSRUHE GMBH, 76133 KARLSRUHE, DE	发明人	SCHOMBURG, WERNER, DR., 76229 KARLSRUHE, DE;KADEL, KLAUS, 76185 KARLSRUHE, DE;WALTER, MANFRED, 74564 CRAILSHEIM, DE
分类号	G03F7/00;(IPC1-7):G03F7/00	主分类号	G03F7/00
代理机构		代理人
主权项
地址

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