| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a micro charged foreign matter from sticking to an electrode, an insulating film coating the electrode and a to-be-attracted body by preventing leaking of an electric field generated by electric potential of the electrode to the outside other than the distance reaching the to-be-attracted body through a dielectric substance. SOLUTION: In this device, an electrode 3 connected to a voltage source is provided, and one surface of a dielectric substance 1 comprising the material of high dielectric constant is covered, and a conductive film 6 or a to-be- attracted body 2 whose material is semiconductor is attracted by the surface of dielectric substance 1 facing the electrode 3 with electrostatic force. In the electrode 3, the surface which is not brought into contact with the dielectric substance 1 is coated with a double film comprising an insulating film 5 and the conductive film 6, so that an electric field generated by the electric potential of the electrode 3 is prevented from leaking to the outside other than the distance reaching the to-be-attracted body 2 through the dielectric substance 1.</p> |
