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发明名称
CLEANER OF SEMICONDUCTOR WAFER
摘要
申请公布号
JPH09232266(A)
申请公布日期
1997.09.05
申请号
JP19960035096
申请日期
1996.02.22
申请人
SHARP CORP
发明人
SAOTOME TAKAHIRO;OKI ICHIRO
分类号
B08B3/02;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/02
代理机构
代理人
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