发明名称 DEVELOPING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a developing apparatus which can effectively remove developer adhered to the end of a developing nozzle. SOLUTION: A liquid sag suction nozzle 15 is provided in a standby pot 4. The nozzle 15 has a suction nozzle part 19a having a suction port corresponding to the end of a developing nozzle 9, and a porous member 18 disposed in the port. Exhaust means is connected to the exhaust port 19b of the nozzle 15 via an exhaust tube 20. The upper surface of the member 18 is disposed near the end 10 of the nozzle 9. The liquid droplet adhered to the end of the nozzle 9 is sucked and removed via the member 18 by sucking it via a suction passage 16a.
申请公布号 JPH09232211(A) 申请公布日期 1997.09.05
申请号 JP19960037889 申请日期 1996.02.26
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 TSUJI MASAO
分类号 G03F7/30;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/30
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