Verfahren zur Herstellung optischer Bauelemente mit angekoppelten Lichtwellenleitern und nach diesem Verfahren hergestellte Bauelemente

摘要

The invention relates to a process for producing an optical component with at least one fibre taper holder (5b) and a fibre taper (9) connected thereto. Firstly a microstructure body is produced by a substrate being coated with resist and the depth of resist decreasing substantially continuously over one area of the substrate. The resist is illuminated through a mask, for example, by synchrotron radiation and subsequently developed. By electroforming and a moulding process such as micro-injection moulding, replicas (8) of the microstructure body are produced in, for example, plastic. The invention also relates to an optical component which has a fibre taper holder (5b) and a fibre taper (9) connected thereto. The fibre taper holder is in the form of a trench with a substantially rectangular cross-section. The width and depth of the trench decrease substantially continuously at least across one region.