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发明名称
HANDOTAISOCHISEIZOYOKISOHANNOSOCHI
摘要
申请公布号
JP2650530(B2)
申请公布日期
1997.09.03
申请号
JP19910241388
申请日期
1991.09.20
申请人
FUJITSU KK
发明人
OOBA TAKAYUKI
分类号
H01L21/205;H01L21/285;H01L21/302;H01L21/306;H01L21/316;H01L21/318;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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