| 发明名称 |
Vertical furnace |
| 摘要 |
A vertical furnace for processing wavers positioned on a support structure. The furnace comprises an inner sleeve, heating means and an outer sleeve. To support the inner sleeve on the support structure a support sleeve is provided engaging with its top and lower part of the inner sleeve and resting with its lower end on the support structure.
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| 申请公布号 |
US5662470(A) |
申请公布日期 |
1997.09.02 |
| 申请号 |
US19950414294 |
申请日期 |
1995.03.31 |
| 申请人 |
ASM INTERNATIONAL N.V. |
发明人 |
HUUSSEN, FRANK;BERENPAS, GERARD;HASPER, ALBERT;DE RIDDER, CHRIS G.M. |
| 分类号 |
H05B3/00;F27B1/09;F27B1/10;H01L21/00;H01L21/02;H01L21/22;(IPC1-7):F27D3/12 |
主分类号 |
H05B3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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