| 摘要 |
PROBLEM TO BE SOLVED: To provide a drive mechanism using a screw rod to be installed in a semiconductor manufacturing device or the like in which it is possible to enhance the easiness in maintenance works, shorten the time for repair, inspection and replacement, and enhance the rate of service time. SOLUTION: A drive mechanism concerned uses a screw rod 25 as a drive motive, in which the input side end part of the screw rod 25 is supported rotatably through an angular bearing 30 while the non-input side end part is supported rotatably through a radial bearing 26. Mounting and removal of the screw rod 25 are made upon putting the non-input side end part in free state and by mounting and removing the angular bearing 30 at the input side end part. |
