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发明名称
SOHOGATAHAKUMAKUTORANJISUTAOYOBISONOSEIZOHOHO
摘要
申请公布号
JP2647020(B2)
申请公布日期
1997.08.27
申请号
JP19940231630
申请日期
1994.09.27
申请人
SEIKOO EPUSON KK
发明人
TSUNEKAWA YOSHIFUMI
分类号
H01L21/8238;H01L27/08;H01L27/092;H01L29/786;(IPC1-7):H01L21/823
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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