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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2646614(B2)
申请公布日期
1997.08.27
申请号
JP19880027932
申请日期
1988.02.09
申请人
SEIKOO EPUSON KK
发明人
HASEGAWA KAZUMASA
分类号
H01L21/302;G02F1/136;G02F1/1368;H01L21/3065;H01L21/324;H01L21/336;H01L27/12;H01L27/14;H01L27/146;H01L29/78;H01L29/786;(IPC1-7):H01L29/786;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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