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经营范围
发明名称
JOATSUCVDSOCHI
摘要
申请公布号
JP2648096(B2)
申请公布日期
1997.08.27
申请号
JP19940170614
申请日期
1994.07.22
申请人
YAMAGATA NIPPON DENKI KK
发明人
SATO AKIRA
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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