发明名称 WIRE CUT FEEDER FOR WIRE BONDER
摘要 PROBLEM TO BE SOLVED: To reduce the size and weight of a wire cut feeder, enhance the mechanical rigidity thereof, suppress the vibration enough, improve the wire cut and wire feed accuracies, facilitate combining the rough feed with inching, and allow the wire cut and wire feed speeds to be changed. SOLUTION: The drive source of a slide block 21 to move wire clamps uses a piezoelectric actuator composed of a feed piezoelectric actuator 52 for expanding the block 21 and two clamp piezoelectric actuators 54, 57 alternately operative to clamp the block 21. The block 21 is moved by a combination of the power on and off of these actuators 52, 54 and 57.
申请公布号 JPH09223711(A) 申请公布日期 1997.08.26
申请号 JP19960052367 申请日期 1996.02.15
申请人 SHINKAWA LTD 发明人 YAMAZAKI NOBUHITO;TORIHATA MINORU;IIYAMA TAKAYUKI
分类号 H01L21/60;B23K20/02;(IPC1-7):H01L21/60 主分类号 H01L21/60
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