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发明名称
MANUFACTURE OF SEMICONDUCTOR AND ITS MANUFACTURING EQUIPMENT
摘要
申请公布号
JPH09223706(A)
申请公布日期
1997.08.26
申请号
JP19960052283
申请日期
1996.02.15
申请人
SONY CORP
发明人
NAGAMOTO NOBUHIRO
分类号
H01L21/56;H01L23/50;(IPC1-7):H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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