| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the detachment of a substrate from a base in spite of the thermal expansion of the substrate and avert the degradation in heat transfer between both by forming the substrate supporting surface of the base as a recessed surface and providing the specified position of a clamper with projecting parts. SOLUTION: The substrate supporting surface 12 of the base 10 is formed as the recessed surface. The parts near the lower parts of two sides 21, 22 facing each other of the clamper 20 and crossing the projecting side parts of the substrate supporting surface 12 of the base 10 are provided with the projecting parts 26 which correspond to these recessed side parts and hold the substrate 2 between these projecting parts and the recessed side parts. According to such constitution, the substrate 2 is curved downward to a projecting shape so as to comply with the recessed surface of the substrate supporting surface 12 of the base 10 by the two projecting parts 26 of the clamper 20 by pressing the substrate 2 toward the base 10 with the clamper 20, by which the substrate 2 is brought into tight contact with the substrate supporting surface 12 of the base 10. The substrate 2 tends to be bulged toward the base 10 side by the heat input to the substrate 2 in the state, by which the substrate is eventually strongly pressed to the substrate supporting surface 12 of the base 10.</p> |
